[內層][自動]
UV LED曝光機

[內層][自動]
UV LED曝光機

產品型號:UVE-A270L UVE-A270LH

1.適用範圍:

製程板厚度:0.05 ~2 mm (0.002”~0.08”)

UVE-A270H 製程板尺寸:

254 x 304.08mm ~ 635x 635 mm

底片尺寸:685.8 x 685.8mm

UVE-A270LH 製程板尺寸:
標準: 254 x304.8 mm ~ 609.6 x 762 mm
加大: 254 x 304.8 mm ~ 622.3 x 812.8 mm
底片尺寸:標準: 660.4 x 812.8mm
加大: 660.4x 863.6mm

  1. 能透過通訊模式補償監控LED亮度品質
    Using communication mode compensated monitoring LED brightness quality.
  2. LED光源模組化設計,方便保養更換,快速經濟
    LED light source modular design that easy maintenance and replacement.
  3. UV LED二次光學,低光角設計
    UV LED secondary optical design,small angle light design.
  4. 能量自動校正與補償,均勻度可自動校正至90%以上
    Automatic energy calibration and compensation, uniformity can automatic
    calibration to above 90%
  5. 多波段透過混波達到最佳解析,線寬線距可達50/50μm
    Through multi-wavelength mixed achieves the best resolution, L/S=50/50μm
  6. 產速可達 >4片/分鐘
    Throughput: >4 pcs/min
  7. 對位精度3σ≦10μm
    Alignment accuracy: 3σ≦10μm

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