[內層][自動]
UV LED曝光機
[內層][自動]
UV LED曝光機
產品型號:UVE-A270L UVE-A270LH
產品聯絡人
(台灣)廖先生
1.適用範圍:
製程板厚度:0.05 ~2 mm (0.002”~0.08”)
UVE-A270H 製程板尺寸:
254 x 304.08mm ~ 635x 635 mm
底片尺寸:685.8 x 685.8mm
UVE-A270LH 製程板尺寸:
標準: 254 x304.8 mm ~ 609.6 x 762 mm
加大: 254 x 304.8 mm ~ 622.3 x 812.8 mm
底片尺寸:標準: 660.4 x 812.8mm
加大: 660.4x 863.6mm
- 能透過通訊模式補償監控LED亮度品質
Using communication mode compensated monitoring LED brightness quality. - LED光源模組化設計,方便保養更換,快速經濟
LED light source modular design that easy maintenance and replacement. - UV LED二次光學,低光角設計
UV LED secondary optical design,small angle light design. - 能量自動校正與補償,均勻度可自動校正至90%以上
Automatic energy calibration and compensation, uniformity can automatic
calibration to above 90% - 多波段透過混波達到最佳解析,線寬線距可達50/50μm
Through multi-wavelength mixed achieves the best resolution, L/S=50/50μm - 產速可達 >4片/分鐘
Throughput: >4 pcs/min - 對位精度3σ≦10μm
Alignment accuracy: 3σ≦10μm
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