UV Cleaner
1.Dominant wavelength
DUV：185nm and 254nm
EUV：172nm
2.Transportation：Robot or conveyor
3.Effect of cleaning：Contact angle≦5∘
4.Uniformity of irradiation：≧90%
5.Cleanliness leve：Class 10
1.Effectively clean the organic substances of the substrate surface by DUV (185nm/254nm) or EUV (172nm)
2.Adopt electronic ballast that can control power output precisely
3.Real time monitor of UV light density with real time power output control function
4.Available from G3.5 to G8.6
5.Apply APC to collect EQ data. Real time error diagnose and classify
Downloads
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