IGZO Annealing Oven
- MAX. temperature:450℃
- Temperature uniformity:±3℃
- O2 control:3%~30%, ±1%
- Humidity control:Absolute humidity 5%~30%, ±1%
- Cleanliness level:Class 10
- Multi-step temperature control
- Recipe edit
- Hot-air circulation or hot plate oven available
- High/low O2 control or high humidity control capable
- Cleanliness level: class 10
- Available from G3.5 to G10.5
- Waste heat recovery system equipped,
- Apply APC to collect EQ data. Real time error diagnose and classify
Downloads
Files |
---|
Download Catalog |