IGZO Annealing Oven

IGZO Annealing Oven

Product Contact
  1. MAX. temperature:450℃
  2. Temperature uniformity:±3℃
  3. O2 control:3%~30%, ±1%
  4. Humidity control:Absolute humidity 5%~30%, ±1%
  5. Cleanliness level:Class 10
  6. Multi-step temperature control
  7. Recipe edit
  1. Hot-air circulation or hot plate oven available
  2. High/low O2 control or high humidity control capable
  3. Cleanliness level: class 10
  4. Available from G3.5 to G10.5
  5. Waste heat recovery system equipped,
  6. Apply APC to collect EQ data. Real time error diagnose and classify

Downloads

Back to top