High Temperature & Inert Gas Vacuum Auto Oven

High Temperature & Inert Gas Vacuum Auto Oven

SKU:QHVO-A12
  1. Temperature Performance:
    150°C-Max.450°C
    ≥250°C ± 2.5°C
    ≤250°C ± 1.5°C
  2. Temp Ramp-rate: 100°C-380°C (≥6°C/min)
  3. Temp Ramp-down: 380°C-100°C (≥3°C/min)
  4. Cleanliness: Class 100
  5. O2 Concentration: <10ppm
  6. Wafer handling:
    Handling: 300&301mm
    Thickness: 600-1500um (max.)
    Warpage: +/- 450um
    Weight: 230-250 g

 

 

  • Comply with SEMI S2 certification
  • High class level for clean-room
  • Excellent thermal uniformity and pressure control
  • Oxygen-free environment
  • Less N2 consumption and shorter cure time
  • SECS/GEM
  • CIM system

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