Clean & Inert Gas Auto Oven
Refer to the catalog
1.Comply with SEMI S2 certification
2.High class level for clean-room
3.Fast thermal control capability
4.SECS/GEM
5.CIM system
Downloads
Files |
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Download Catalog |
Refer to the catalog
1.Comply with SEMI S2 certification
2.High class level for clean-room
3.Fast thermal control capability
4.SECS/GEM
5.CIM system
Files |
---|
Download Catalog |